Chemistry of Atomic Layer Deposition

This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

Author: Seán Thomas Barry
Binding Type: Paperback
Publisher: de Gruyter
Published: 11/22/2021
Series: de Gruyter Textbook
Pages: 113
Weight: 0.43lbs
Size: 9.61h x 6.69w x 0.24d
ISBN: 9783110712513